Semiconductor Manufacturing and Process Technology - ETR 239


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ETR 239 - Semiconductor Manufacturing and Process Technology
Studies process and technology used in the manufacturing of semiconductor integrated circuits. Includes materials physics and crystal growth, clean room processes, layering, deposition, thin film epitaxy, doping ion implantation, metallization, e-beam and photolithography, packaging, safety and mask design. Includes quality control in device manufacturing; simulation and lab work for materials, device measurements and testing. Perquisites: ETR 185 or ETR 156 or equivalent.
Lecture 2-3 hours. Laboratory 3 hours. Total 5-6 hours per week.
3-4 credits